Volume:
Vol-3896
ITTAP 2024 | Year:
2024
Paper:
« paper28
| short11 |
paper29 »
Information System for Design of Thin Multilayer Film Processes Parameters Management based on Diffusion
Vitalii Chyzh
dblp
Mykhaylo Petryk
dblp
Oksana Petryk
dblp
Halyna Tsupryk
dblp
486-493
PDF